| Observations of ion-beam formation in a current-free double layer X Sun, AM Keesee, C Biloiu, EE Scime, A Meige, C Charles, RW Boswell Physical review letters 95 (2), 025004, 2005 | 168 | 2005 |
| An alternative method for gas temperature determination in nitrogen plasmas: Fits of the bands of the first positive system (B Π3g→ A Σ3u+) C Biloiu, X Sun, Z Harvey, E Scime Journal of Applied Physics 101 (7), 2007 | 80 | 2007 |
| Amorphous fluorocarbon polymer films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane vapor. II. Dielectric and … C Biloiu, IA Biloiu, Y Sakai, H Sugawara, A Ohta Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (4 …, 2004 | 74 | 2004 |
| Parallel velocity and temperature of argon ions in an expanding, helicon source driven plasma X Sun, C Biloiu, R Hardin, EE Scime Plasma Sources Science and Technology 13 (3), 359, 2004 | 74 | 2004 |
| Determination of rotational and vibrational temperatures of a nitrogen helicon plasma C Biloiu, X Sun, Z Harvey, E Scime Review of scientific instruments 77 (10), 2006 | 56 | 2006 |
| Flow, flow shear, and related profiles in helicon plasmas E Scime, R Hardin, C Biloiu, AM Keesee, X Sun Physics of plasmas 14 (4), 2007 | 48 | 2007 |
| Laser induced fluorescence in a pulsed argon plasma E Scime, C Biloiu, C Compton, F Doss, D Venture, J Heard, E Choueiri, ... Review of Scientific Instruments 76 (2), 2005 | 48 | 2005 |
| Time-resolved measurements of double layer evolution in expanding plasma EE Scime, IA Biloiu, J Carr, SC Thakur, M Galante, A Hansen, ... Physics of plasmas 17 (5), 2010 | 39 | 2010 |
| Time-resolved measurements of double layer evolution in expanding plasma EE Scime, IA Biloiu, J Carr, SC Thakur, M Galante, A Hansen, ... Physics of plasmas 17 (5), 2010 | 39 | 2010 |
| Ion beam acceleration in a divergent magnetic field IA Biloiu, EE Scime, C Biloiu Applied physics letters 92 (19), 2008 | 37 | 2008 |
| Evolution of the parallel and perpendicular ion velocity distribution functions in pulsed helicon plasma sources obtained by time resolved laser induced fluorescence C Biloiu, X Sun, E Choueiri, F Doss, E Scime, J Heard, R Spektor, ... Plasma Sources Science and Technology 14 (4), 766, 2005 | 37 | 2005 |
| Scanning internal probe for plasma particle, fluctuation, and LIF tomographic measurements C Biloiu, E Scime, X Sun, B McGeehan Review of scientific instruments 75 (10), 4296-4298, 2004 | 28 | 2004 |
| One-and two-dimensional laser induced fluorescence at oblique incidence IA Biloiu, EE Scime, C Biloiu Plasma Sources Science and Technology 18 (2), 025012, 2009 | 27 | 2009 |
| Plasma Sources Sci. Technol X Sun, C Biloiu, R Hardin, EE Scime Plasma Sources Sci. Technol 13 (359), 2004 | 26 | 2004 |
| Extreme edge uniformity control A Likhanskii, M Petterson, J Hautala, A Renau, CA Rowland, C Biloiu US Patent 10,665,433, 2020 | 21 | 2020 |
| Spectral plasma temperature determination of thermionic vacuum arc in the titanium vapors C Biloiu, H Ehrich, G Musa Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (3 …, 2001 | 19 | 2001 |
| Apparatus and techniques to treat substrates using directional plasma and reactive gas S Liang, C Biloiu, GFR Gilchrist, V Singh, C Campbell, R Hertel, A Kontos, ... US Patent 9,706,634, 2017 | 18 | 2017 |
| In situ control of ion angular distribution in a processing apparatus C Biloiu, N Munoz, L Godet, A Renau US Patent 9,293,301, 2016 | 18 | 2016 |
| High density helicon plasma source for wide ribbon ion beam generation C Biloiu, A Perel, J Scheuer US Patent 8,142,607, 2012 | 16 | 2012 |
| Apparatus and techniques to treat substrates using directional plasma and reactive gas S Liang, C Biloiu, GFR Gilchrist, V Singh, C Campbell, R Hertel, A Kontos, ... US Patent 10,004,133, 2018 | 15 | 2018 |
