| Peculiarities of SnO2 thin film deposition by spray pyrolysis for gas sensor application G Korotcenkov, V Brinzari, J Schwank, M DiBattista, A Vasiliev Sensors and Actuators B: Chemical 77 (1-2), 244-252, 2001 | 242 | 2001 |
| Structural characterization of SnO2 gas sensing films deposited by spray pyrolysis G Korotcenkov, M DiBattista, J Schwank, V Brinzari Materials Science and Engineering: B 77 (1), 33-39, 2000 | 74 | 2000 |
| Localized backside chip cooling with integrated smart valves M DiBattista, RH Livengood US Patent 6,825,557, 2004 | 68 | 2004 |
| Oxygen sensors: materials and applications JW Schwank, M DiBattista MRS Bulletin 24 (6), 44-48, 1999 | 56 | 1999 |
| Adjusting the frequency of film bulk acoustic resonators LP Wang, Q Ma, Q Tran, T Rini, M DiBattista US Patent App. 10/201,796, 2004 | 46 | 2004 |
| Steps toward automated deprocessing of integrated circuits EL Principe, N Asadizanjani, D Forte, M Tehranipoor, R Chivas, ... ISTFA 2017: Proceedings from the 43rd International Symposium for Testing …, 2017 | 38 | 2017 |
| Determination of diffusion in polycrystalline platinum thin films M DiBattista, JW Schwank Journal of applied physics 86 (9), 4902-4907, 1999 | 37 | 1999 |
| Hot stage for scanning probe microscope M DiBattista, SV Patel, JL Gland, JW Schwank US Patent 5,731,587, 1998 | 31 | 1998 |
| Survivability of a silicon-based microelectronic gas-detector structure for high-temperature flow applications SV Patel, M DiBattista, JL Gland, JW Schwank Sensors and Actuators B: Chemical 37 (1-2), 27-35, 1996 | 25 | 1996 |
| Method to direct pattern metals on a substrate T Holtermann, A Graupera, M DiBattista US Patent 8,278,220, 2012 | 24 | 2012 |
| In-situ elevated temperature imaging of thin films with a microfabricated hot stage for scanning probe microscopes M DiBattista, SV Patel, JF Mansfield, JW Schwank Applied surface science 141 (1-2), 119-128, 1999 | 21 | 1999 |
| Plasma FIB deprocessing of integrated circuits from the backside EL Principe, N Asadizanjani, D Forte, M Tehranipoor, R Chivas, ... FICS Research Annual Conference on Cybersecurity, 2017 | 15 | 2017 |
| Adaptive Grinding and Polishing of Silicon Integrated Circuits to Ultra-thin Remaining Thickness R Chivas, S Silverman, M DiBattista ISTFA 2015, 460-465, 2015 | 14 | 2015 |
| Adjusting the frequency of film bulk acoustic resonators LP Wang, M DiBattista, S Fortuna, Q Ma, V Rao US Patent 6,975,184, 2005 | 14 | 2005 |
| Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing RH Livengood, P Winer, G Woods, M DiBattista US Patent 6,355,494, 2002 | 13 | 2002 |
| Fast, full chip image stitching of nanoscale integrated circuits D Zhang, G Van Der Wal, P Miller, D Stoker, E Matlin, N Marri, G Gan, ... Technical report, 2019 | 11 | 2019 |
| Preparation of Wafer Level Packaged Integrated Circuits Using Pulsed Laser Assisted Chemical Etching R Chivas, N Dandekar, S Silverman, R Cruz, M DiBattista ISTFA 2012, 491-497, 2012 | 9 | 2012 |
| Microwave Frequency Signal Propagation in Backside Focused Ion Beam (FIB) Fabricated Interconnects JA Rowlette, M DiBattista, S Fortuna, RH Livengood ISTFA 2002, 559-568, 2002 | 9 | 2002 |
| Electrical contacts to nanomaterials PR Bandaru, H Faraby, M DiBattista Journal of nanoscience and nanotechnology 15 (12), 9315-9329, 2015 | 8 | 2015 |
| Three-dimensional nanoscale mapping of state-of-the-art field-effect transistors (FinFETs) P Parikh, C Senowitz, D Lyons, I Martin, TJ Prosa, M DiBattista, A Devaraj, ... Microscopy and Microanalysis 23 (5), 916-925, 2017 | 7 | 2017 |
Johannes SchwankUniversity of MichiganE-mail confirmado em umich.edu
