| Integrated humidity sensor based on SU-8 polymer microdisk microresonator M Eryürek, Z Tasdemir, Y Karadag, S Anand, N Kilinc, BE Alaca, A Kiraz Sensors and Actuators B: Chemical 242, 1115-1120, 2017 | 83 | 2017 |
| Progress in EUV resists towards high-NA EUV lithography X Wang, Z Tasdemir, I Mochi, M Vockenhuber, L van Lent-Protasova, ... Extreme Ultraviolet (EUV) Lithography X 10957, 19-27, 2019 | 30 | 2019 |
| A deep etching mechanism for trench-bridging silicon nanowires Z Tasdemir, N Wollschläger, W Österle, Y Leblebici, BE Alaca Nanotechnology 27 (9), 095303, 2016 | 23 | 2016 |
| State-of-the-art EUV materials and processes for the 7nm node and beyond E Buitrago, M Meeuwissen, O Yildirim, R Custers, R Hoefnagels, ... Extreme Ultraviolet (EUV) Lithography VIII 10143, 170-177, 2017 | 20 | 2017 |
| Evaluation of EUV resists for 5nm technology node and beyond Z Tasdemir, X Wang, I Mochi, L van Lent-Protasova, M Meeuwissen, ... International conference on extreme ultraviolet lithography 2018 10809, 85-94, 2018 | 19 | 2018 |
| Effect of native oxide on stress in silicon nanowires: Implications for nanoelectromechanical systems M Nasr Esfahani, S Zare Pakzad, T Li, XF Li, Z Tasdemir, ... ACS Applied Nano Materials 5 (9), 13276-13285, 2022 | 12 | 2022 |
| Chemically amplified EUV resists approaching 11nm half-pitch Z Tasdemir, M Vockenhuber, I Mochi, KG Olvera, M Meeuwissen, ... Extreme Ultraviolet (EUV) Lithography IX 10583, 451-457, 2018 | 12 | 2018 |
| Real-and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊ 044) and tilt of suspended monolithic silicon nanowire structures S Dolabella, R Frison, GA Chahine, C Richter, TU Schulli, Z Tasdemir, ... Journal of applied crystallography 53 (1), 58-68, 2020 | 11 | 2020 |
| Top-down technique for scaling to nano in silicon MEMS M Yilmaz, Y Kilinc, G Nadar, Z Tasdemir, N Wollschläger, W Oesterle, ... Journal of Vacuum Science & Technology B 35 (2), 2017 | 11 | 2017 |
| Determination of the elastic behavior of silicon nanowires within a scanning electron microscope N Wollschläger, Z Tasdemir, I Häusler, Y Leblebici, W Österle, BE Alaca Journal of Nanomaterials 2016, 2016 | 11 | 2016 |
| Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures Z Tasdemir, O Peric, D Sacchetto, GE Fantner, Y Leblebici, BE Alaca IEEE Nanotechnology Express 1 (1), 2-5, 2015 | 11 | 2015 |
| Studying resist performance for contact holes printing using EUV interference lithography X Wang, LT Tseng, D Kazazis, Z Tasdemir, M Vockenhuber, I Mochi, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 18 (1), 013501-013501, 2019 | 10 | 2019 |
| A new characterization approach to study the mechanical behavior of silicon nanowires S Zare Pakzad, M Nasr Esfahani, Z Tasdemir, N Wollschlaeger, XF Li, T Li, ... Mrs Advances 6, 500-505, 2021 | 9 | 2021 |
| Monolithic fabrication of silicon nanowires bridging thick silicon structures Z Tasdemir, O Peric, D Sacchetto, GE Fantner, Y Leblebici, BE Alaca IEEE Transactions on Nanotechnology 17 (6), 1299-1302, 2018 | 9 | 2018 |
| Nanomechanical modeling of the bending response of silicon nanowires S Zare Pakzad, M Nasr Esfahani, Z Tasdemir, N Wollschläger, T Li, ... ACS Applied Nano Materials 6 (17), 15465-15478, 2023 | 6 | 2023 |
| Contrast matching of line gratings obtained with NXE3XXX and EUV-interference lithography Z Tasdemir, I Mochi, KG Olvera, M Meeuwissen, O Yildirim, R Custers, ... International Conference on Extreme Ultraviolet Lithography 2017 10450, 280-289, 2017 | 4 | 2017 |
| Flexible Ceramic Polymer Composite Substrates With Spatially Variable Dielectrics for Miniaturized RF Applications Z Tasdemir, G Kiziltas Symposium on Novel Materials and Devices for Spintronics 1183, 145-150, 2010 | 2 | 2010 |
| Photomask X Wang, LT Tseng, D Kazazis, Z Tasdemir, M Vockenhuber, I Mochi, ... | | 2019 |
| Interface Engineering with Self‐Assembled Monolayers in Biosensors C Taşaltín, İ Gürol, H Duran, Y Uludağ, UA Sezer, Z Taşdemir, F Başarír Hybrid Organic‐Inorganic Interfaces: Towards Advanced Functional Materials …, 2018 | | 2018 |
| Determination of mechanical properties of different sized silicon and silica nanowires tested in SEM N Wollschläger, A Kranzmann, M Yilmaz, Z Tasdemir, BE Alaca NANOMECHANICAL TESTING IN MATERIALS RESEARCH AND DEVELOPMENT VI, 2017 | | 2017 |
B. ERDEM ALACAKoç UniversityE-mail confirmado em ku.edu.tr
