| Growth Inhibitor To Homogenize Nucleation and Obtain Smooth HfB2 Thin Films by Chemical Vapor Deposition S Babar, N Kumar, P Zhang, JR Abelson, AC Dunbar, SR Daly, ... Chemistry of Materials 25 (5), 662-667, 2013 | 42 | 2013 |
| Methods of forming magnetic materials and articles formed thereby S Sahoo, M Zhu, MC Kautzky, GS Girolami, JR Abelson, P Zhang, ... US Patent App. 13/630,036, 2012 | 26* | 2012 |
| Iron CVD from iron pentacarbonyl: Growth inhibition by CO dissociation and use of ammonia to restore constant growth P Zhang, E Mohimi, TK Talukdar, JR Abelson, GS Girolami Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 34 (5 …, 2016 | 18 | 2016 |
| Chemical Vapor Deposition of Copper: Use of a Molecular Inhibitor to Afford Uniform Nanoislands or Smooth Films S Babar, LM Davis, P Zhang, E Mohimi, GS Girolami, JR Abelson ECS Journal of Solid State Science and Technology 3 (5), Q79-Q83, 2014 | 17 | 2014 |
| Iron–cobalt alloy thin films with high saturation magnetizations grown by conformal metalorganic CVD P Zhang, S Babar, JR Abelson, S Sahoo, M Zhu, M Kautzky, LM Davis, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 33 (6 …, 2015 | 7 | 2015 |
| Showerhead with air-gapped plenums and overhead isolation gas distributor N Shankar, JD Womack, MG Rainville, EC Draper, PG Ramnani, F Bi, ... US Patent 10,472,716, 2019 | 3 | 2019 |
| Selective deposition of etch-stop layer for enhanced patterning N Shankar, KS Reddy, J Henri, P Zhang, E Mohimi, B Jariwala, ... US Patent App. 15/972,918, 2019 | 3 | 2019 |
| Chemical vapor deposition of magnetic iron-cobalt alloy thin films: Use of ammonia to stabilize growth from carbonyl precursors P Zhang, Z Zhang, JR Abelson, GS Girolami Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 36 (6 …, 2018 | 2 | 2018 |
| Selective deposition of etch-stop layer for enhanced patterning N Shankar, KS Reddy, J Henri, P Zhang, E Mohimi, B Jariwala, ... US Patent 11,094,542, 2021 | 1 | 2021 |
| Selective deposition of etch-stop layer for enhanced patterning N Shankar, KS Reddy, J Henri, P Zhang, E Mohimi, B Jariwala, ... US Patent App. 17/389,301, 2021 | | 2021 |
| Methods of forming magnetic materials and articles formed thereby S Sahoo, M Zhu, MC Kautzky, G Girolami, J Abelson, P Zhang, S Babar US Patent App. 16/990,107, 2021 | | 2021 |
| Showerhead with air-gapped plenums and overhead isolation gas distributor N Shankar, JD Womack, MG Rainville, EC Draper, PG Ramnani, F Bi, ... US Patent 10,745,806, 2020 | | 2020 |
| Pre-treatment method to improve selectivity in a selective deposition process D Hausmann, E Mohimi, P Zhang, PC Lemaire, K Sharma, AR Fox, ... US Patent 10,643,889, 2020 | | 2020 |
| CVD of magnetic iron-cobalt alloy thin films: surface poisoning from carbonyl precursors and use of ammonia as a chemical inhibitor to restore growth kinetics P Zhang University of Illinois at Urbana-Champaign, 2016 | | 2016 |
