Comparative study of silicon-based ultraviolet photodetectors L Shi, S Nihtianov
IEEE Sensors Journal 12 (7), 2453-2459, 2012
185 2012 Design strategies for eddy-current displacement sensor systems: Review and recommendations MR Nabavi, SN Nihtianov
IEEE Sensors Journal 12 (12), 3346-3355, 2012
157 2012 A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time S Xia, K Makinwa, S Nihtianov
2012 IEEE International Solid-State Circuits Conference, 198-200, 2012
134 2012 Advances in capacitive, eddy current, and magnetic displacement sensors and corresponding interfaces B George, Z Tan, S Nihtianov
IEEE Transactions on Industrial Electronics 64 (12), 9595-9607, 2017
122 2017 Lithographic apparatus and device manufacturing method TPM Cadee, JJ Ottens, JJSM Mertens, FE De Jong, K Goorman, ...
US Patent 7,304,715, 2007
117 2007 Lithographic apparatus and device manufacturing method having liquid evaporation control TPM Cadee, JHW Jacobs, N Ten Kate, ER Loopstra, ALHJ Vermeer, ...
US Patent 7,804,575, 2010
110 2010 Smart sensors and MEMS: Intelligent sensing devices and microsystems for industrial applications S Nihtianov, A Luque
Woodhead Publishing, 2018
109 * 2018 An Energy-Efficient 3.7-nV/ H Jiang, S Nihtianov, KAA Makinwa
IEEE Journal of Solid-State Circuits 54 (3), 856-864, 2018
80 2018 Eddy-current sensor interface for advanced industrial applications MR Nabavi, S Nihtianov
IEEE Transactions on Industrial Electronics 58 (9), 4414-4423, 2010
74 2010 Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography F Sarubbi, LK Nanver, TLM Scholtes, SN Nihtianov, F Scholze
ESSDERC 2008-38th European Solid-State Device Research Conference, 278-281, 2008
63 2008 Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector SN al.
US Patent 8426831 B2, 2013
58 * 2013 Sensor and lithographic apparatus S Nihtianov, HV Kok, MGD Wehrens
US Patent 9,331,117, 2016
54 2016 Measuring in the subnanometer range: Capacitive and eddy current nanodisplacement sensors S Nihtianov
IEEE Industrial Electronics Magazine 8 (1), 6-15, 2014
54 2014 Capacitive-sensor interface with high accuracy and stability R Nojdelov, S Nihtianov
IEEE Transactions on Instrumentation and Measurement 58 (5), 1633-1639, 2009
48 2009 An interface for eddy-current displacement sensors with 15-bit resolution and 20 MHz excitation MR Nabavi, MAP Pertijs, S Nihtianov
IEEE journal of solid-state circuits 48 (11), 2868-2881, 2013
47 2013 A novel interface for eddy current displacement sensors MR Nabavi, S Nihtianov
IEEE transactions on instrumentation and measurement 58 (5), 1623-1632, 2009
47 2009 A precision capacitance-to-digital converter with 16.7-bit ENOB and 7.5-ppm/° C thermal drift R Yang, MAP Pertijs, S Nihtianov
IEEE Journal of Solid-State Circuits 52 (11), 3018-3031, 2017
38 2017 An interface circuit for RC impedance sensors with a relaxation oscillator SN Nihtianov, GP Shterev, B Iliev, GCM Meijer
IEEE Transactions on Instrumentation and Measurement 50 (6), 1563-1567, 2001
38 2001 Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector S Nihtianov, AJ Van Der Sijs, B Moest, PWJM Kemper, MAM Haast, ...
US Patent 8,138,485, 2012
37 2012 High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application L Shi, F Sarubbi, SN Nihtianov, LK Nanver, TLM Scholtes, F Scholze
2009 35th annual conference of IEEE industrial electronics, 1877-1882, 2009
37 2009 
Lis NanverE-mail confirmado em utwente.nl
