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Harald Okorn-Schmidt (HF Schmidt)
Harald Okorn-Schmidt (HF Schmidt)
LLRC OG
E-mail confirmado em llrc.at
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EAU guidelines on prostate cancer
G Aus, CC Abbou, M Bolla, A Heidenreich, HP Schmid, H Van Poppel, ...
European urology 48 (4), 546-551, 2005
8442005
Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues
EP Gusev, E Cartier, DA Buchanan, M Gribelyuk, M Copel, ...
Microelectronic Engineering 59 (1-4), 341-349, 2001
5442001
Physical and electrical characterization of Hafnium oxide and Hafnium silicate sputtered films
A Callegari, E Cartier, M Gribelyuk, HF Okorn-Schmidt, T Zabel
Journal of Applied Physics 90 (12), 6466-6475, 2001
3842001
Ultrathin high-K gate stacks for advanced CMOS devices
EP Gusev, DA Buchanan, E Cartier, A Kumar, D DiMaria, S Guha, ...
International Electron Devices Meeting. Technical Digest (Cat. No. 01CH37224 …, 2001
3782001
EAU guidelines on prostate cancer
G Aus, CC Abbou, D Pacik, HP Schmid, H Van Poppel, JM Wolff, F Zattoni
European urology 40 (2), 97-101, 2001
2042001
Characterization of silicon surface preparation processes for advanced gate dielectrics
HF Okorn-Schmidt
ibm Journal of Research and Development 43 (3), 351-326, 1999
1871999
80 nm polysilicon gated n-FETs with ultra-thin Al/sub 2/O/sub 3/gate dielectric for ULSI applications
DA Buchanan, EP Gusev, E Cartier, H Okorn-Schmidt, K Rim, ...
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No …, 2000
1792000
High mobility p-channel germanium MOSFETs with a thin Ge oxynitride gate dielectric
H Shang, H Okorn-Schmidt, KK Chan, M Copel, JA Ott, PM Kozlowski, ...
Digest. International Electron Devices Meeting,, 441-444, 2002
1622002
Interfacial oxidation process for high-k gate dielectric process integration
AW Ballantine, DA Buchanan, EA Cartier, KK Chan, MW Copel, ...
US Patent 6,444,592, 2002
1492002
The IMEC clean: A new concept for particle and metal removal on Si surfaces
M Meuris, PW Mertens, A Opdebeeck, HF Schmidt, M Depas, G Vereecke, ...
Solid State Technology 38 (7), 109-113, 1995
1451995
High temperature stability of dielectrics on Si: Interfacial metal diffusion and mobility degradation
S Guha, EP Gusev, H Okorn-Schmidt, M Copel, LÅ Ragnarsson, ...
Applied Physics Letters 81 (16), 2956-2958, 2002
1172002
Ultrathin high-K dielectrics grown by atomic layer deposition: a comparative study of ZrO2, HfO2, Y2O3 and Al2O3
EP Gusev, E Cartier, M Copel, M Gribelyuk, DA Buchanan, ...
Electrochemical Society Proceedings 9, 189-195, 2001
742001
Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
I Teerlinck, PW Mertens, HF Schmidt, M Meuris, MM Heyns
Journal of the Electrochemical Society 143 (10), 3323, 1996
641996
Sonic cleaning with an interference signal
EE Fisch, GW Gale, HF Okorn-Schmidt, WA Syverson
US Patent 6,276,370, 2001
602001
Particle cleaning technologies to meet advanced semiconductor device process requirements
HF Okorn-Schmidt, F Holsteyns, A Lippert, D Mui, M Kawaguchi, ...
ECS Journal of Solid State Science and Technology 3 (1), N3069, 2013
562013
H2O2 decomposition and its impact on silicon surface roughening and gate oxide integrity
HF Schmidt, M Meuris, PW Mertens, ALP Rotondaro, MM Heyns, TQ Hurd, ...
Japanese journal of applied physics 34 (2S), 727, 1995
531995
New wet cleaning strategies for obtaining highly reliable thin oxides
MM Heyns, S Verhaverbeke, M Meuris, PP Mertens, H Schmidt, M Kubota, ...
MRS Online Proceedings Library (OPL) 315, 35, 1993
471993
Tumour markers in prostate cancer: EGTM recommendations
A Semjonow, W Albrecht, P Bialk, A Gerl, R Lamerz, HP Schmidt, ...
Anticancer research 19, 2785-2820, 1999
411999
High-dielectric constant insulators for FEOL capacitors
AW Ballantine, DA Buchanan, EA Cartier, DD Coolbaugh, EP Gousev, ...
US Patent 6,511,873, 2003
382003
Enhancement of semiconductor wafer cleaning by chelating agent addition
GW Gale, DL Rath, EI Cooper, S Estes, HF Okorn-Schmidt, J Brigante, ...
Journal of the Electrochemical Society 148 (9), G513, 2001
362001
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Artigos 1–20