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Michel Dantas
Michel Dantas
Professor Doutor, CECS, Universidade Federal do ABC
E-mail confirmado em ufabc.edu.br
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Silicon field-emission devices fabricated using the hydrogen implantation–porous silicon (HI–PS) micromachining technique
MOS Dantas, E Galeazzo, HEM Peres, MM Kopelvski, ...
Journal of microelectromechanical systems 17 (5), 1263-1269, 2008
162008
HI–PS technique for MEMS fabrication
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez, A Errachid
Sensors and Actuators A: Physical 115 (2-3), 608-616, 2004
152004
Characterization system based on image mapping for field emission devices
MM Kopelvski, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez, ...
Measurement 93, 208-214, 2016
142016
Silicon micromechanical structures fabricated by electrochemical process
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez
IEEE sensors journal 3 (6), 722-727, 2003
142003
Development of fast response humidity sensors based on carbon nanotubes
MC Moraes, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez, ...
Proc. IEEE 5th Int. Conf. Sensor Device Technol. Appl, 7-10, 2014
72014
ZnO nanowire-based field emission devices through a microelectronic compatible route
MO da Silva Dantas, D Criado, A Zúñiga, W Silva, E Galeazzo, H Peres, ...
Journal of Integrated Circuits and Systems 15 (1), 1-6, 2020
62020
Potentialities of a new dedicated system for real time field emission devices characterization: a case study
MM Kopelvski, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez, ...
2019 4th International Symposium on Instrumentation Systems, Circuits and …, 2019
62019
Otimização do processo de obtenção do PS por processo eletroquímico e sua obtenção em áreas seletivas
MOS Dantas
Monografia apresentada a Faculdade de Tecnologia de sao Paulo, 2000
62000
Eletrochemical Process for Silicon Tips Fabrication
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez
Eletrochemical Society Proceedings 9, 445-452, 2003
52003
MWCNT devices fabricated by dielectrophoresis: Study of their electrical behavior related to deposited nanotube amount for gas sensing applications
E Galeazzo, MC Moraes, HEM Peres, MOS Dantas, VGC Lobo, ...
Journal of Integrated Circuits and Systems 10 (1), 13-20, 2015
42015
Porous silicon masking by silicon oxide and hydrogen ion implantation
HE Peres, E Galeazzo, MO Dantas, FJ Ramirez-Fernandez
Proceeding of the XVI International Conference on Microelectronics and …, 2001
42001
Evaluation of the Electrical Resistance Response of Insulating Glass Surface to Sense and Classify Humidity and VOCs Vapors
HEM Peres, E Galeazzo, MOS Dantas, W Beccaro, GP Filbrich, ...
IEEE Sensors Journal 18 (10), 3940 - 3945, 2018
32018
Obtenà § ã o de microestruturas de silÃcio utilizando a tecnologia do silÃcio poroso como camada sacrificial.
MOS Dantas
Universidade de Sã o Paulo, 2003
32003
Silicon micromechanical structures fabricated by electrochemical process
MOS Dantas, E Galeazzo, HEM Pees, FJR Fernandez
SENSORS, 2002 IEEE 1, 575-579, 2002
32002
ZnO nanowires growth from thin zinc films for field emission purposes
MOS Dantas, DCP Souza, AA Zúñiga-Páez, WAA Silva, E Galeazzo, ...
2019 34th Symposium on Microelectronics Technology and Devices (SBMicro), 1-4, 2019
22019
Improvement of Si Field Emission Sensors Fabrication Technology by Carbon Nanotubes
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez
Proceedings IMCS 2012, 1005-1008, 2012
2*2012
Porous silicon sacrificial layers applied on micromechanical structures fabrication
MOS Dantas, E Galeazzo, HEM Peres, FJR Fernandez
Microelectronics Technology and Devices, SBMICRO 2002: Proceedings of the …, 2002
22002
Field emission enhancement achieved by selective multi-walled carbon nanotubes deposition over silicon microstructures
MOS Dantas, E Galeazzo, HEM Peres, FJ Ramirez-Fernandez
2014 29th Symposium on Microelectronics Technology and Devices (SBMicro), 1-4, 2014
12014
Electrical behavior of devices composed by dielectrophoretically deposited carbon nanotubes for gas sensing applications
MC Moraes, E Galeazzo, HEM Peres, MOS Dantas, ...
2014 29th Symposium on Microelectronics Technology and Devices (SBMicro), 1-4, 2014
12014
Desenvolvimento de dispositivos de emissão por efeito de campo elétrico fabricados pela técnica HI-PS
MOS Dantas
Tese apresentada à Universidade de São Paulo, 2008
12008
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Artigos 1–20