| W: Al2O3 Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition S Babar, AU Mane, A Yanguas-Gil, E Mohimi, RT Haasch, JW Elam The Journal of Physical Chemistry C 120 (27), 14681-14689, 2016 | 26 | 2016 |
| Iron CVD from iron pentacarbonyl: Growth inhibition by CO dissociation and use of ammonia to restore constant growth P Zhang, E Mohimi, TK Talukdar, JR Abelson, GS Girolami Journal of Vacuum Science & Technology A 34 (5), 051518, 2016 | 18 | 2016 |
| Surface-Selective Chemical Vapor Deposition of Copper Films through the Use of a Molecular Inhibitor S Babar, E Mohimi, B Trinh, GS Girolami, JR Abelson ECS Journal of Solid State Science and Technology 4 (7), N60-N63, 2015 | 17 | 2015 |
| Chemical Vapor Deposition of Copper: Use of a Molecular Inhibitor to Afford Uniform Nanoislands or Smooth Films S Babar, LM Davis, P Zhang, E Mohimi, GS Girolami, JR Abelson ECS Journal of Solid State Science and Technology 3 (5), Q79-Q83, 2014 | 17 | 2014 |
| USE OF AN INHIBITOR MOLECULE IN CHEMICAL VAPOR DEPOSITION TO AFFORD DEPOSITION OF COPPER ON A METAL SUBSTRATE WITH NO DEPOSITION ON ADJACENT SIO2 SUBSTRATE J Abelson, S Babar, E Mohimi, G Girolami US Patent 20,160,148,839, 2016 | 7 | 2016 |
| Conformal growth of low friction HfB x C y hard coatings E Mohimi, T Ozkan, S Babar, AA Polycarpou, JR Abelson Thin Solid Films 592, 182-188, 2015 | 6 | 2015 |
