Ivo Rangelow Prof. Dr.
Ivo Rangelow Prof. Dr.
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Radiation hard silicon detectors—Developments by the RD48 (ROSE) collaboration
G Lindström, M Ahmed, S Albergo, P Allport, D Anderson, L Andricek, ...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2001
586*2001
Components for high speed atomic force microscopy
GE Fantner, G Schitter, JH Kindt, T Ivanov, K Ivanova, R Patel, ...
Ultramicroscopy 106 (8-9), 881-887, 2006
2372006
Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systems
IW Rangelow
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (4 …, 2003
2372003
Liquifier pump control in an extrusion apparatus
JW Comb
US Patent 6,814,907, 2004
169*2004
Electrostatically driven microgripper
BE Volland, H Heerlein, IW Rangelow
Microelectronic engineering 61, 1015-1023, 2002
1472002
ISFET performance enhancement by using the improved circuit techniques
WY Chung, CH Yang, DG Pijanowska, PB Grabiec, W Torbicz
Sensors and Actuators B: Chemical 113 (1), 555-562, 2006
1352006
Piezoresistive sensors for scanning probe microscopy
T Gotszalk, P Grabiec, IW Rangelow
Ultramicroscopy 82 (1-4), 39-48, 2000
1262000
Electrical characterization of ISFETs
D Tomaszewski, CM Yang, B Jaroszewicz, M Zaborowski, P Grabiec, ...
Journal of telecommunications and information technology, 55-60, 2007
1242007
Nanoscale engineering and optical addressing of single spins in diamond
S Pezzagna, D Wildanger, P Mazarov, AD Wieck, Y Sarov, I Rangelow, ...
small 6 (19), 2117-2121, 2010
1112010
Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers
R Linnemann, T Gotszalk, IW Rangelow, P Dumania, E Oesterschulze
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
1061996
Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase …
R Pedrak, T Ivanov, K Ivanova, T Gotszalk, N Abedinov, IW Rangelow, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2003
1022003
Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
N Abedinov, P Grabiec, T Gotszalk, T Ivanov, J Voigt, IW Rangelow
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (6 …, 2001
982001
Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution
J Meijer, S Pezzagna, T Vogel, B Burchard, HH Bukow, IW Rangelow, ...
Applied Physics A 91 (4), 567-571, 2008
972008
Characterization of a cantilever with an integrated deflection sensor
R Linnemann, T Gotszalk, L Hadjiiski, IW Rangelow
Thin Solid Films 264 (2), 159-164, 1995
901995
Dry etching-based silicon micro-machining for MEMS
IW Rangelow
Vacuum 62 (2-3), 279-291, 2001
892001
Concept of deterministic single ion doping with sub-nm spatial resolution
J Meijer, T Vogel, B Burchard, IW Rangelow, L Bischoff, J Wrachtrup, ...
Applied Physics A 83 (2), 321-327, 2006
862006
Novel high resolution scanning thermal probe
K Edinger, T Gotszalk, IW Rangelow
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001
772001
Dry etching with gas chopping without rippled sidewalls
B Volland, F Shi, P Hudek, H Heerlein, IW Rangelow
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1999
751999
Fiber-coupled single-photon detectors based on NbN superconducting nanostructures for practical quantum cryptography and photon-correlation studies
W Słysz, M Węgrzecki, J Bar, P Grabiec, M Górska, V Zwiller, C Latta, ...
Applied Physics Letters 88 (26), 261113, 2006
692006
Single atom doping for quantum device development in diamond and silicon
CD Weis, A Schuh, A Batra, A Persaud, IW Rangelow, J Bokor, CC Lo, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
672008
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