| Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication IW Rangelow, T Ivanov, A Ahmad, M Kaestner, C Lenk, IS Bozchalooi, ... Journal of Vacuum Science & Technology B 35 (6), 2017 | 99 | 2017 |
| Nanolithography by scanning probes on calixarene molecular glass resist using mix-and-match lithography M Kaestner, M Hofer, IW Rangelow Journal of Micro/Nanolithography, MEMS, and MOEMS 12 (3), 031111-031111, 2013 | 63 | 2013 |
| Pattern-generation and pattern-transfer for single-digit nano devices IW Rangelow, A Ahmad, T Ivanov, M Kaestner, Y Krivoshapkina, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 47 | 2016 |
| Scanning probe nanolithography on calixarene M Kaestner, IW Rangelow Microelectronic engineering 97, 96-99, 2012 | 47 | 2012 |
| Advanced electric-field scanning probe lithography on molecular resist using active cantilever M Kaestner, C Aydogan, T Ivanov, A Ahmad, T Angelov, A Reum, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031202-031202, 2015 | 46 | 2015 |
| Scanning proximal probe lithography for sub-10 nm resolution on calix [4] resorcinarene M Kaestner, IW Rangelow Journal of Vacuum Science & Technology B 29 (6), 2011 | 45 | 2011 |
| Scanning probes in nanostructure fabrication M Kaestner, T Ivanov, A Schuh, A Ahmad, T Angelov, Y Krivoshapkina, ... Journal of Vacuum Science & Technology B 32 (6), 2014 | 42 | 2014 |
| Large area fast-AFM scanning with active “Quattro” cantilever arrays A Ahmad, N Nikolov, T Angelov, T Ivanov, A Reum, I Atanasov, E Guliyev, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 37 | 2016 |
| Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography Z Durrani, M Jones, F Abualnaja, C Wang, M Kaestner, S Lenk, C Lenk, ... Journal of Applied Physics 124 (14), 2018 | 36 | 2018 |
| Multi-step scanning probe lithography (SPL) on calixarene with overlay alignment M Kaestner, IW Rangelow Alternative Lithographic Technologies IV 8323, 280-288, 2012 | 35 | 2012 |
| Scanning probe lithography approach for beyond CMOS devices Z Durrani, M Jones, M Kaestner, M Hofer, E Guliyev, A Ahmad, T Ivanov, ... Alternative Lithographic Technologies V 8680, 237-248, 2013 | 32 | 2013 |
| Scanning probe lithography on calixarene towards single-digit nanometer fabrication M Kaestner, IW Rangelow International Journal of Extreme Manufacturing 2 (3), 032005, 2020 | 30 | 2020 |
| Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy IW Rangelow, M Kaestner, T Ivanov, A Ahmad, S Lenk, C Lenk, E Guliyev, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 30 | 2018 |
| The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber B Tordoff, C Hartfield, AJ Holwell, S Hiller, M Kaestner, S Kelly, J Lee, ... Applied Microscopy 50 (1), 24, 2020 | 29 | 2020 |
| Molecular glass resists for scanning probe lithography C Neuber, A Ringk, T Kolb, F Wieberger, P Strohriegl, HW Schmidt, ... Alternative Lithographic Technologies VI 9049, 375-383, 2014 | 27 | 2014 |
| Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography T Angelov, A Ahmad, E Guliyev, A Reum, I Atanasov, T Ivanov, V Ishchuk, ... Journal of Vacuum Science & Technology B 34 (6), 2016 | 25 | 2016 |
| Electric field scanning probe lithography on molecular glass resists using self-actuating, self-sensing cantilever M Kaestner, K Nieradka, T Ivanov, S Lenk, Y Krivoshapkina, A Ahmad, ... Alternative Lithographic Technologies VI 9049, 55-63, 2014 | 23 | 2014 |
| 0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography N Vorbringer-Doroshovets, F Balzer, R Fuessl, E Manske, M Kaestner, ... Alternative Lithographic Technologies V 8680, 249-258, 2013 | 23 | 2013 |
| Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching C Lenk, M Hofmann, S Lenk, M Kaestner, T Ivanov, Y Krivoshapkina, ... Microelectronic Engineering 192, 77-82, 2018 | 20 | 2018 |
| Field-emission scanning probe lithography tool for 150 mm wafer M Holz, E Guliyev, A Ahmad, T Ivanov, A Reum, M Hofmann, C Lenk, ... Journal of Vacuum Science & Technology B 36 (6), 2018 | 19 | 2018 |
